Autonomous Sputtering Tool – Main Chamber
SAM.GOV Due: July 3, 2025 at 11:00 PM UTC
In-Active Solicitation Source Url

Summary

The National Renewable Energy Laboratory (NREL) is soliciting bids for an Autonomous Sputtering Tool – Main Chamber, aimed at enhancing the autonomous synthesis of nitride and oxide thin film materials. This opportunity is particularly suited for contractors with expertise in manufacturing highly automated sputtering systems that can integrate with robotic handling and in-situ analysis tools. The selected contractor will be responsible for providing a system that meets specific technical specifications, including vacuum integrity, automated sample handling, and compatibility with external robotic systems. The project is part of NREL's initiative to advance semiconductor development and requires a solution that supports real-time decision-making through AI integration, thereby accelerating materials discovery and development.
Description

It is the intent of NREL to award one (1) Purchase Order under this solicitation for a Autonomous Sputtering Tool – Main Chamber as specified in the Technical Specifications – Attachment No. 1. The objective of this purchase is to enable Autonomous Experimentation (AE) synthesis of ni

Entities
EDO
Department of Energy
NAICS
334519
Set Aside
None
Place of Performance
Golden , Colorado 80401
Point of Contact
Full Name Email Phone Type
Lu Lindsay [email protected] primary
Attachments
  • Attachment+1-Sputtering+Chamber+Technical+Specifications.pdf
  • Request+for+Quote+%28RFQ%29+No.+2025025165+-+Autonomous+Sputtering+Tool+-+Main+Chamber.pdf
  • Amendment+No.+1+to+RFQ+No.2025026165.pdf